The impact of focused ion beam induced damage on scanning spreading resistance microscopy

dc.contributor.author	Pandey, Komal
dc.contributor.author	Paredis, Kristof
dc.contributor.author	Hantschel, Thomas
dc.contributor.author	Drijbooms, Chris
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.imecauthor	Pandey, Komal
dc.contributor.imecauthor	Paredis, Kristof
dc.contributor.imecauthor	Hantschel, Thomas
dc.contributor.imecauthor	Drijbooms, Chris
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.orcidimec	Paredis, Kristof::0000-0002-5163-4164
dc.contributor.orcidimec	Hantschel, Thomas::0000-0001-9476-4084
dc.date.accessioned	2021-10-29T01:46:48Z
dc.date.available	2021-10-29T01:46:48Z
dc.date.embargo	9999-12-31
dc.date.issued	2020
dc.identifier.issn	2045-2322
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/35697
dc.identifier.url	https://www.nature.com/articles/s41598-020-71826-w
dc.source.beginpage	14893
dc.source.journal	Scientific Reports
dc.source.volume	10
dc.title	The impact of focused ion beam induced damage on scanning spreading resistance microscopy
dc.type	Journal article
dspace.entity.type	Publication
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