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The impact of focused ion beam induced damage on scanning spreading resistance microscopy
Publication:
The impact of focused ion beam induced damage on scanning spreading resistance microscopy
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Date
2020
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pandey, Komal
;
Paredis, Kristof
;
Hantschel, Thomas
;
Drijbooms, Chris
;
Vandervorst, Wilfried
Journal
Scientific Reports
Abstract
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1913
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Acq. date: 2025-12-16
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Metrics
Views
1913
since deposited on 2021-10-29
3
last month
1
last week
Acq. date: 2025-12-16
Citations