The EUV CNT pellicle: balancing material properties to optimize performance

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Authors
Pollentier, Ivan; Timmermans, Marina; Huyghebaert, Cedric; Brems, Steven; Gallagher, Emily
Conference
Extreme Ultraviolet (EUV) Lithography XI
Title
The EUV CNT pellicle: balancing material properties to optimize performance
Publication type
Proceedings paper
Embargo date
9999-12-31
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