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B and Ga co-doping in epitaxial SiGe: challenges and opportunities

dc.contributor.authorPorret, Clément
dc.contributor.authorRengo, Gianluca
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorPetersen Barbosa Lima, Lucas
dc.contributor.authorXie, Qi
dc.contributor.authorDouhard, Bastien
dc.contributor.authorAyyad, Mustafa
dc.contributor.authorVantomme, André
dc.contributor.authorLoo, Roger
dc.date.accessioned2021-10-29T02:18:49Z
dc.date.available2021-10-29T02:18:49Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35755
dc.sourceIIOimport
dc.titleB and Ga co-doping in epitaxial SiGe: challenges and opportunities
dc.typeMeeting abstract
dc.contributor.imecauthorPorret, Clément
dc.contributor.imecauthorRengo, Gianluca
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorPetersen Barbosa Lima, Lucas
dc.contributor.imecauthorXie, Qi
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorAyyad, Mustafa
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecPorret, Clément::0000-0002-4561-348X
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewyes
dc.source.beginpageG01-1732
dc.source.conferenceECS PRIME 2020
dc.source.conferencedate4/10/2020
dc.source.conferencelocationHonolulu USA
dc.identifier.urlhttps://ecs.confex.com/ecs/prime2020/meetingapp.cgi/Paper/141753
imec.availabilityPublished - imec


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