Publication:
Strain measurement in semiconductor FinFET devices using a novel moiré demodulation technique
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2050 since deposited on 2021-10-29
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Acq. date: 2025-10-24
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Views
2050 since deposited on 2021-10-29
434item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations