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Highly doped SiGe epitaxy in view of S/D applications
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Authors
Rengo, Gianluca
;
Porret, Clément
;
Hikavyy, Andriy
;
Rosseel, Erik
;
Pourtois, Geoffrey
;
Vantomme, Andre
;
Loo, Roger
Conference
ECS-2020 Prime Meeting: SiGe, Ge, and Related Compounds: Materials, Processing, and Devices 9
Title
Highly doped SiGe epitaxy in view of S/D applications
Publication type
Proceedings paper
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