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Impact of methane concentration on surface morphology and boron incorporation of heavily boron-doped single crystal diamond layers
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Authors
Rouzbahani Bayatani, Rozita
;
Nicley, Shannon S.
;
Vanpoucke, Danny E.P.
;
Lloret, Fernando
;
Pobedinskas, Paulius
;
Araujo, Daniel
;
Haenen, Ken
ISSN
0008-6223
Journal
Carbon
Volume
172
Title
Impact of methane concentration on surface morphology and boron incorporation of heavily boron-doped single crystal diamond layers
Publication type
Journal article
Embargo date
9999-12-31
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