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Impact of methane concentration on surface morphology and boron incorporation of heavily boron-doped single crystal diamond layers

dc.contributor.authorRouzbahani Bayatani, Rozita
dc.contributor.authorNicley, Shannon S.
dc.contributor.authorVanpoucke, Danny E.P.
dc.contributor.authorLloret, Fernando
dc.contributor.authorPobedinskas, Paulius
dc.contributor.authorAraujo, Daniel
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-29T03:17:35Z
dc.date.available2021-10-29T03:17:35Z
dc.date.issued2020
dc.identifier.issn0008-6223
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35858
dc.sourceIIOimport
dc.titleImpact of methane concentration on surface morphology and boron incorporation of heavily boron-doped single crystal diamond layers
dc.typeJournal article
dc.contributor.imecauthorRouzbahani Bayatani, Rozita
dc.contributor.imecauthorLloret, Fernando
dc.contributor.imecauthorPobedinskas, Paulius
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecPobedinskas, Paulius::0000-0001-8136-5172
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage463
dc.source.endpage473
dc.source.journalCarbon
dc.source.volume172
dc.identifier.urlhttps://doi.org/10.1016/j.carbon.2020.10.061
imec.availabilityPublished - open access


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