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Progression of logic device and DTCO to enable advance scaling

dc.contributor.authorSarkar, Satadru
dc.contributor.authorChehab, Bilal
dc.contributor.authorRyckaert, Julien
dc.contributor.authorNa, Myung Hee
dc.contributor.authorSpessot, Alessio
dc.date.accessioned2021-10-29T03:41:20Z
dc.date.available2021-10-29T03:41:20Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35899
dc.sourceIIOimport
dc.titleProgression of logic device and DTCO to enable advance scaling
dc.typeProceedings paper
dc.contributor.imecauthorSarkar, Satadru
dc.contributor.imecauthorChehab, Bilal
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorNa, Myung Hee
dc.contributor.imecauthorSpessot, Alessio
dc.source.peerreviewyes
dc.source.beginpage113280P
dc.source.conferenceDesign-Process-Technology Co-optimization for Manufacturability XIV
dc.source.conferencedate24/02/2020
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttps://doi.org/10.1117/12.2551690
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 11328


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