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The use of ALD layers for hermetic encapsulation in the development of a flexible implantable micro electrode for neural recording and stimulation
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Authors
Schaubroeck, David
;
Li, Changzheng
;
Verplancke, Rik
;
Cuypers, Dieter
;
Cauwe, Maarten
;
Op de Beeck, Maaike
Conference
20th Conference on Atomic Layer Deposition - ALD
Title
The use of ALD layers for hermetic encapsulation in the development of a flexible implantable micro electrode for neural recording and stimulation
Publication type
Meeting abstract
Embargo date
9999-12-31
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