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Insight into selective surface reactions of dimethylamino-trimethylsilane for area-selective deposition of metal, ntride, and oxide

dc.contributor.authorSoethoudt, Job
dc.contributor.authorTomczak, Yoann
dc.contributor.authorMeynaerts, Ben
dc.contributor.authorChan, BT
dc.contributor.authorDelabie, Annelies
dc.date.accessioned2021-10-29T04:31:37Z
dc.date.available2021-10-29T04:31:37Z
dc.date.issued2020
dc.identifier.issn1932-7447
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35986
dc.sourceIIOimport
dc.titleInsight into selective surface reactions of dimethylamino-trimethylsilane for area-selective deposition of metal, ntride, and oxide
dc.typeJournal article
dc.contributor.imecauthorSoethoudt, Job
dc.contributor.imecauthorTomczak, Yoann
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.source.peerreviewyes
dc.source.beginpage7163
dc.source.endpage7173
dc.source.journalJournal of Physical Chemistry C
dc.source.issue13
dc.source.volume124
dc.identifier.urlhttps://doi.org/10.1021/acs.jpcc.9b11270
imec.availabilityPublished - imec


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