Authors

Soussou, Assawer; Schram, Tom; Miyaguchi, Kenichi; Chakarov, Ivan; Parvais, Bertrand; Ervin, Joseph

Conference

International Conference on Solid State Devices and Materials - SSDM 2020

Title

Evaluation of the impact of source/drain epi implementation on logic performance using combined process and circuit simulation

Publication type

Proceedings paper