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A correlative ToF-SIMS/SPM methodology for probing 3D devices

dc.contributor.authorSpampinato, Valentina
dc.contributor.authorDialameh, Masoud
dc.contributor.authorFranquet, Alexis
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorConard, Thierry
dc.contributor.authorvan der Heide, Paul
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-29T04:38:27Z
dc.date.available2021-10-29T04:38:27Z
dc.date.issued2020
dc.identifier.issn0003-2700
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35997
dc.sourceIIOimport
dc.titleA correlative ToF-SIMS/SPM methodology for probing 3D devices
dc.typeJournal article
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.imecauthorDialameh, Masoud
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorvan der Heide, Paul
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.contributor.orcidimecDialameh, Masoud::0000-0002-1439-590X
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecvan der Heide, Paul::0000-0001-6292-0329
dc.source.peerreviewyes
dc.source.beginpage11413
dc.source.endpage11419
dc.source.journalAnalytical Chemistry
dc.source.issue16
dc.source.volume92
dc.identifier.urlhttps://doi.org/10.1021/acs.analchem.0c02406
imec.availabilityPublished - imec


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