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The cryogenic behaviour of metal-oxide-semiconductor transistors fabricated in high-resistivity silicon substrates
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Authors
Simoen, Eddy
;
Vanstraelen, Guy
;
Claeys, Cor
Journal
Semiconductor Science and Technology
Volume
9
Title
The cryogenic behaviour of metal-oxide-semiconductor transistors fabricated in high-resistivity silicon substrates
Publication type
Journal article
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