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80nm tall thermally stable cost effective FinFETs for advanced DRAM periphery devices for AI/ML and Automotive applications

dc.contributor.authorSpessot, Alessio
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorDentoni Litta, Eugenio
dc.contributor.authorDupuy, Emmanuel
dc.contributor.authorO'Sullivan, Barry
dc.contributor.authorBastos, Joao
dc.contributor.authorCapogreco, Elena
dc.contributor.authorMiyaguchi, Kenichi
dc.contributor.authorMachkaoutsan, Vladimir
dc.contributor.authorYoon, Younggwang
dc.contributor.authorFazan, Pierre
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2021-10-29T04:40:16Z
dc.date.available2021-10-29T04:40:16Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36000
dc.sourceIIOimport
dc.title80nm tall thermally stable cost effective FinFETs for advanced DRAM periphery devices for AI/ML and Automotive applications
dc.typeProceedings paper
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorDentoni Litta, Eugenio
dc.contributor.imecauthorDupuy, Emmanuel
dc.contributor.imecauthorO'Sullivan, Barry
dc.contributor.imecauthorBastos, Joao
dc.contributor.imecauthorCapogreco, Elena
dc.contributor.imecauthorMiyaguchi, Kenichi
dc.contributor.imecauthorMachkaoutsan, Vladimir
dc.contributor.imecauthorYoon, Younggwang
dc.contributor.imecauthorFazan, Pierre
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecDupuy, Emmanuel::0000-0003-3341-1618
dc.contributor.orcidimecO'Sullivan, Barry::0000-0002-9036-8241
dc.contributor.orcidimecBastos, Joao::0000-0002-8877-9850
dc.contributor.orcidimecMiyaguchi, Kenichi::0000-0002-7073-6457
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.source.peerreviewyes
dc.source.beginpageB-10-03
dc.source.conference2020 International Conferene on Solid State Devices and Materials - SSDM
dc.source.conferencedate27/09/2020
dc.source.conferencelocationonline online
dc.identifier.urlhttps://confit.atlas.jp/guide/event/ssdm2020/subject/B-10-03/date
imec.availabilityPublished - imec


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