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3D simulation for melt laser anneal integration in FinFET's contact

dc.contributor.authorTabata, Toshiyuki
dc.contributor.authorCurvers, Benoit
dc.contributor.authorHuet, Karim
dc.contributor.authorChew, Soon Aik
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2021-10-29T05:04:09Z
dc.date.available2021-10-29T05:04:09Z
dc.date.issued2020
dc.identifier.issn2168-6734
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36039
dc.sourceIIOimport
dc.title3D simulation for melt laser anneal integration in FinFET's contact
dc.typeJournal article
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecEveraert, Jean-Luc::0000-0002-0660-9090
dc.source.peerreviewyes
dc.source.beginpage1323
dc.source.endpage1327
dc.source.journalIEEE Journal of the Electron Devices Society
dc.source.volume8
dc.identifier.urlhttps://ieeexplore.ieee.org/document/9223740
imec.availabilityPublished - imec


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