Publication:

Self-annealing characterization of electroplated copper films

Date

1999
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Author(s)

Lagrange, Sébastien
;
Brongersma, Sywert  
;
Judelewicz, Moshe
;
Saerens, Annelies
;
Vervoort, Iwan
;
Richard, Emmanuel
;
Palmans, Roger
;
Maex, Karen  

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