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Molybdenum CMP for damascene applications

dc.contributor.authorTeugels, Lieve
dc.contributor.authorPhilipsen, Harold
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorDevriendt, Katia
dc.date.accessioned2021-10-29T05:18:36Z
dc.date.available2021-10-29T05:18:36Z
dc.date.issued2020-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36063
dc.sourceIIOimport
dc.titleMolybdenum CMP for damascene applications
dc.typeMeeting abstract
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorPhilipsen, Harold
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecPhilipsen, Harold::0000-0002-5029-1104
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.source.peerreviewyes
dc.source.beginpageS10.5
dc.source.conference29th Materials for Advanced Metallization
dc.source.conferencedate16/11/2020
dc.source.conferencelocationAutrans France
dc.identifier.urlhttps://www.web-events.net/doc/users/840/bib/globalprogramvf.pdf
imec.availabilityPublished - imec


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