Impact of surface condition on Cobalt drift into LK3.0 films

Thumbnail
View/open
Metadata
Show full item record
Authors
Tierno, Davide; Lesniewska, Alicja; Kljucar, Luka; van der Veen, Marleen; Tokei, Zsolt; Croes, Kristof
Conference
IEEE International Interconnect Technology Conference - IITC 2020
Title
Impact of surface condition on Cobalt drift into LK3.0 films
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections