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A modified capacitance/voltage technique to characterize copper drift diffusion in organic low-K dielectrics

dc.contributor.authorLanckmans, Filip
dc.contributor.authorGeenen, Luc
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-06T11:40:44Z
dc.date.available2021-10-06T11:40:44Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3607
dc.sourceIIOimport
dc.titleA modified capacitance/voltage technique to characterize copper drift diffusion in organic low-K dielectrics
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.conferenceAdvanced Metallization Conference; September 28-30, 1999; Orlando, FL, USA.
imec.availabilityPublished - imec


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