dc.contributor.author | Lauwers, A. | |
dc.contributor.author | Besser, Paul | |
dc.contributor.author | Gutt, T. | |
dc.contributor.author | Satta, Alessandra | |
dc.contributor.author | de Potter de ten Broeck, Muriel | |
dc.contributor.author | Lindsay, Richard | |
dc.contributor.author | Roelandts, Nico | |
dc.contributor.author | Loosen, Fred | |
dc.contributor.author | Stucchi, Michele | |
dc.contributor.author | Vrancken, Christa | |
dc.contributor.author | Deweerdt, Bruno | |
dc.contributor.author | Maex, Karen | |
dc.date.accessioned | 2021-10-06T11:41:53Z | |
dc.date.available | 2021-10-06T11:41:53Z | |
dc.date.issued | 1999 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3612 | |
dc.source | IIOimport | |
dc.title | Comparative study of Ni-silicide and Co-silicide for sub 0.25 μm technologies | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Besser, Paul | |
dc.contributor.imecauthor | de Potter de ten Broeck, Muriel | |
dc.contributor.imecauthor | Loosen, Fred | |
dc.contributor.imecauthor | Stucchi, Michele | |
dc.contributor.imecauthor | Vrancken, Christa | |
dc.contributor.imecauthor | Deweerdt, Bruno | |
dc.contributor.imecauthor | Maex, Karen | |
dc.source.peerreview | no | |
dc.source.conference | European Workshop Materials for Advanced Metallization; March 8-10, 1999; Oostende, Belgium. | |
imec.availability | Published - imec | |