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Comparative study of Ni-silicide and Co-silicide for sub 0.25 μm technologies

dc.contributor.authorLauwers, A.
dc.contributor.authorBesser, Paul
dc.contributor.authorGutt, T.
dc.contributor.authorSatta, Alessandra
dc.contributor.authorde Potter de ten Broeck, Muriel
dc.contributor.authorLindsay, Richard
dc.contributor.authorRoelandts, Nico
dc.contributor.authorLoosen, Fred
dc.contributor.authorStucchi, Michele
dc.contributor.authorVrancken, Christa
dc.contributor.authorDeweerdt, Bruno
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-06T11:41:53Z
dc.date.available2021-10-06T11:41:53Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3612
dc.sourceIIOimport
dc.titleComparative study of Ni-silicide and Co-silicide for sub 0.25 μm technologies
dc.typeOral presentation
dc.contributor.imecauthorBesser, Paul
dc.contributor.imecauthorde Potter de ten Broeck, Muriel
dc.contributor.imecauthorLoosen, Fred
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorDeweerdt, Bruno
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.conferenceEuropean Workshop Materials for Advanced Metallization; March 8-10, 1999; Oostende, Belgium.
imec.availabilityPublished - imec


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