dc.contributor.author | Li, H. | |
dc.contributor.author | Vereecke, Guy | |
dc.contributor.author | Schaekers, Marc | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.contributor.author | Sleeckx, Erik | |
dc.contributor.author | Maex, Karen | |
dc.contributor.author | Froyen, L. | |
dc.date.accessioned | 2021-10-14T11:29:36Z | |
dc.date.available | 2021-10-14T11:29:36Z | |
dc.date.issued | 1999 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3619 | |
dc.source | IIOimport | |
dc.title | Thermal desorption issues related to silicidation and back-end metallization | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Vereecke, Guy | |
dc.contributor.imecauthor | Schaekers, Marc | |
dc.contributor.imecauthor | Sleeckx, Erik | |
dc.contributor.imecauthor | Maex, Karen | |
dc.contributor.orcidimec | Vereecke, Guy::0000-0001-9058-9338 | |
dc.contributor.orcidimec | Schaekers, Marc::0000-0002-1496-7816 | |
dc.contributor.orcidimec | Sleeckx, Erik::0000-0003-2560-6132 | |
dc.source.peerreview | no | |
dc.source.conference | Advanced Metallization Conference; 28-30 September 1999; Orlando, FL, USA. | |
dc.source.conferencelocation | | |
imec.availability | Published - imec | |