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Study of ALD barrier layer for the embedding of electronic and opto-electronic components in a smart microystem in direct contact with the human body

dc.contributor.authorVanhaverbeke, Celine
dc.date.accessioned2021-10-29T06:45:57Z
dc.date.available2021-10-29T06:45:57Z
dc.date.issued2020-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36205
dc.sourceIIOimport
dc.titleStudy of ALD barrier layer for the embedding of electronic and opto-electronic components in a smart microystem in direct contact with the human body
dc.typePHD thesis
dc.source.peerreviewno
dc.contributor.thesisadvisorDe Smet, Herbert
dc.contributor.thesisadvisorCauwe, Maarten
dc.identifier.urlhttps://biblio.ugent.be/publication/8670116
imec.availabilityPublished - imec


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