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Study of ALD barrier layer for the embedding of electronic and opto-electronic components in a smart microystem in direct contact with the human body
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Authors
Vanhaverbeke, Celine
Supervisor
De Smet, Herbert; Cauwe, Maarten
Title
Study of ALD barrier layer for the embedding of electronic and opto-electronic components in a smart microystem in direct contact with the human body
Publication type
PHD thesis
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