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Study of ALD barrier layer for the embedding of electronic and opto-electronic components in a smart microystem in direct contact with the human body

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1903 since deposited on 2021-10-29
2last month
2last week
Acq. date: 2026-01-08

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1903 since deposited on 2021-10-29
2last month
2last week
Acq. date: 2026-01-08

Citations