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Study of ALD barrier layer for the embedding of electronic and opto-electronic components in a smart microystem in direct contact with the human body
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1901 since deposited on 2021-10-29
2last month
Acq. date: 2025-12-12
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Metrics
Views
1901 since deposited on 2021-10-29
2last month
Acq. date: 2025-12-12
Citations