dc.contributor.author | Verduijn, Erik | |
dc.contributor.author | Welling, Ulrich | |
dc.contributor.author | Tang, Jiuzhou | |
dc.contributor.author | Stock, Hans-Jurgen | |
dc.contributor.author | Klostermann, Ulrich | |
dc.contributor.author | Demmerle, Wolfgang | |
dc.contributor.author | De Bisschop, Peter | |
dc.date.accessioned | 2021-10-29T07:10:25Z | |
dc.date.available | 2021-10-29T07:10:25Z | |
dc.date.issued | 2020 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/36243 | |
dc.source | IIOimport | |
dc.title | Prediction of EUV stochastic microbridge probabilities by lithography simulations | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Verduijn, Erik | |
dc.contributor.imecauthor | Welling, Ulrich | |
dc.contributor.imecauthor | De Bisschop, Peter | |
dc.source.peerreview | yes | |
dc.source.beginpage | 113230K | |
dc.source.conference | Extreme Ultraviolet (EUV) Lithography XI | |
dc.source.conferencedate | 23/02/2020 | |
dc.source.conferencelocation | San Jose, CA USA | |
dc.identifier.url | https://doi.org/10.1117/12.2552236 | |
imec.availability | Published - imec | |
imec.internalnotes | Proceedings of SPIE; Vol. 11323 | |