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Study of the early stage kinetics of SOI formation in stimulated regimes
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Authors
Litovchenko, V.
;
Romanyuk, B.
;
Efremov, A.
;
Melnik, V.
;
Claeys, C.
;
Vanhellemont, Jan
Conference
Symposium E of the European Materials Research Society 1999 Spring Meeting; June 1-4, 1999; Strasbourg, France.
Title
Study of the early stage kinetics of SOI formation in stimulated regimes
Publication type
Oral presentation
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