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Acoustic manipulation capabilities of a multifrequency aluminium nitride based PMUT

dc.contributor.authorWeekers, Bart
dc.contributor.authorBillen, Margo
dc.contributor.authorRochus, Veronique
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorLagae, Liesbet
dc.date.accessioned2021-10-29T07:56:28Z
dc.date.available2021-10-29T07:56:28Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36314
dc.sourceIIOimport
dc.titleAcoustic manipulation capabilities of a multifrequency aluminium nitride based PMUT
dc.typeOral presentation
dc.contributor.imecauthorWeekers, Bart
dc.contributor.imecauthorBillen, Margo
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorLagae, Liesbet
dc.contributor.orcidimecWeekers, Bart::0000-0001-5949-8411
dc.contributor.orcidimecBillen, Margo::0000-0002-0189-7388
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceCOMSOL Conference 2020 Europe
dc.source.conferencedate14/10/2020
dc.source.conferencelocationvirtual virtual
dc.identifier.urlhttps://www.comsol.com/paper/acoustic-manipulation-capabilities-of-a-multifrequency-aln-based-pmut-95811
imec.availabilityPublished - open access


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