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Design, fabrication and first testing of a novel opto-mechanical ultrasound sensor in silicon photonics

dc.contributor.authorWesterveld, Wouter
dc.contributor.authorMahmud Ul Hasan, Hasan MD
dc.contributor.authorSeveri, Simone
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorRochus, Veronique
dc.date.accessioned2021-10-29T08:04:30Z
dc.date.available2021-10-29T08:04:30Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36326
dc.sourceIIOimport
dc.titleDesign, fabrication and first testing of a novel opto-mechanical ultrasound sensor in silicon photonics
dc.typeOral presentation
dc.contributor.imecauthorWesterveld, Wouter
dc.contributor.imecauthorMahmud Ul Hasan, Hasan MD
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorRochus, Veronique
dc.source.peerreviewno
dc.source.conferenceSPIE Photonics West - BiOS - Photons Plus Ultrasound: Imaging and Sensing 2020 (Conference 11240)
dc.source.conferencedate1/02/2020
dc.source.conferencelocationSan Francisco USA
imec.availabilityPublished - imec
imec.internalnotespaper niet in proceedings


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