The rinsing problem: effect of solute-surface interactions on wafer purity
dc.contributor.author | Loewenstein, Lee | |
dc.contributor.author | Mertens, Paul | |
dc.date.accessioned | 2021-10-14T11:29:43Z | |
dc.date.available | 2021-10-14T11:29:43Z | |
dc.date.issued | 1999 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3632 | |
dc.source | IIOimport | |
dc.title | The rinsing problem: effect of solute-surface interactions on wafer purity | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Mertens, Paul | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 1 | |
dc.source.endpage | 6 | |
dc.source.conference | Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon | |
dc.source.conferencedate | 21/09/1998 | |
dc.source.conferencelocation | Oostende Belgium | |
imec.availability | Published - open access | |
imec.internalnotes | Solid State Phenomena; Vols. 65-66 |