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RF/high-speed I/O ESD protection: Co-optimizing strategy between BEOL capacitance and HBM immunity in advanced CMOS process
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Authors
Wu, Wei-Min
;
Ker, Ming-Dou
;
Chen, Shih-Hung
;
Chen, Jie-Ting
;
Linten, Dimitri
;
Groeseneken, Guido
DOI
10.1109/TED.2020.2994492
ISSN
0018-9383
Issue
7
Journal
IEEE Transactions on Electron Devices
Volume
67
Title
RF/high-speed I/O ESD protection: Co-optimizing strategy between BEOL capacitance and HBM immunity in advanced CMOS process
Publication type
Journal article
Embargo date
9999-12-31
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