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Test structures for MCM-D technology characterization

dc.contributor.authorLozano, M.
dc.contributor.authorSantander, J.
dc.contributor.authorCabruja, E.
dc.contributor.authorPerello, Carles
dc.contributor.authorUllan, M.
dc.contributor.authorLora-Tamayo, E.
dc.contributor.authorDoyle, R.
dc.contributor.authorMcCarthy, C.
dc.contributor.authorBarton, J.
dc.date.accessioned2021-10-14T11:29:46Z
dc.date.available2021-10-14T11:29:46Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3635
dc.sourceIIOimport
dc.titleTest structures for MCM-D technology characterization
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage184
dc.source.endpage192
dc.source.journalIEEE Trans. Semiconductor Manufacturing
dc.source.issue2
dc.source.volume12
imec.availabilityPublished - open access


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