Test structures for MCM-D technology characterization

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Authors

Lozano, M.; Santander, J.; Cabruja, E.; Perello, Carles; Ullan, M.; Lora-Tamayo, E.; Doyle, R.; McCarthy, C.; Barton, J.

Issue

2

Journal

IEEE Trans. Semiconductor Manufacturing

Volume

12

Title

Test structures for MCM-D technology characterization

Publication type

Journal article

Embargo date

9999-12-31

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