Publication:

Test structures for MCM-D technology characterization

Date

1999

Journal article

Simple item page Full metadata Statistics

Files

3601.pdf 1.16 MB

Author(s)

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Perello, Carles

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Lora-Tamayo, E.

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Journal

IEEE Trans. Semiconductor Manufacturing

Metrics

1977 since deposited on 2021-10-14

Acq. date: 2026-01-06