Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Test structures for MCM-D technology characterization
Publication:
Test structures for MCM-D technology characterization
Date
1999
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
3601.pdf
1.16 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lozano, M.
;
Santander, J.
;
Cabruja, E.
;
Perello, Carles
;
Ullan, M.
;
Lora-Tamayo, E.
;
Doyle, R.
;
McCarthy, C.
;
Barton, J.
Journal
IEEE Trans. Semiconductor Manufacturing
Abstract
Description
Metrics
Views
1973
since deposited on 2021-10-14
417
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1973
since deposited on 2021-10-14
417
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations