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Correlation between pattern density and linewidth variation in silicon photonics waveguides

dc.contributor.authorXing, Yufei
dc.contributor.authorDong, Jiaxing
dc.contributor.authorKhan, Muhammad Umar
dc.contributor.authorBogaerts, Wim
dc.date.accessioned2021-10-29T08:33:00Z
dc.date.available2021-10-29T08:33:00Z
dc.date.issued2020-03
dc.identifier.issn1094-4087
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36368
dc.sourceIIOimport
dc.titleCorrelation between pattern density and linewidth variation in silicon photonics waveguides
dc.typeJournal article
dc.contributor.imecauthorKhan, Muhammad Umar
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.orcidimecKhan, Muhammad Umar::0000-0001-5760-7485
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage7961
dc.source.endpage7968
dc.source.journalOptics Express
dc.source.issue6
dc.source.volume28
dc.identifier.urlhttps://doi.org/10.1364/OE.388149
imec.availabilityPublished - open access


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