Authors

Xing, Yufei; Wang, Mi; Ruocco, Alfonso; Geessels, Joris; Khan, Muhammad Umar; Bogaerts, Wim

ISSN

2578-7519

Issue

2

Journal

OSA Continuum

Volume

3

Title

Compact silicon photonics circuit to extract multiple parameters for process control monitoring

Publication type

Journal article

Embargo date

9999-12-31