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Compact silicon photonics circuit to extract multiple parameters for process control monitoring

dc.contributor.authorXing, Yufei
dc.contributor.authorWang, Mi
dc.contributor.authorRuocco, Alfonso
dc.contributor.authorGeessels, Joris
dc.contributor.authorKhan, Muhammad Umar
dc.contributor.authorBogaerts, Wim
dc.date.accessioned2021-10-29T08:33:42Z
dc.date.available2021-10-29T08:33:42Z
dc.date.issued2020-02
dc.identifier.issn2578-7519
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36369
dc.sourceIIOimport
dc.titleCompact silicon photonics circuit to extract multiple parameters for process control monitoring
dc.typeJournal article
dc.contributor.imecauthorWang, Mi
dc.contributor.imecauthorKhan, Muhammad Umar
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.orcidimecKhan, Muhammad Umar::0000-0001-5760-7485
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage379
dc.source.endpage390
dc.source.journalOSA Continuum
dc.source.issue2
dc.source.volume3
dc.identifier.urlhttps://doi.org/10.1364/OSAC.383711
imec.availabilityPublished - open access


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