Fin bending in dimensional scaling

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Authors
Zhang, Liping; Hellin, David; Sepulveda Marquez, Alfonso; Altamirano Sanchez, Efrain; Lazzarino, Frederic; Morin, Pierre; Wang, Shouhua; Hopf, Toby; Kenis, Karine; Lorant, Christophe; Sebaai, Farid; Batuk, Dmitry; Briggs, Basoene; Mertens, Hans; Demuynck, Steven
Conference
2020 SPIE Advanced Lithography: Advances in Patterning Materials and Processes XXXII
Title
Fin bending in dimensional scaling
Publication type
Oral presentation
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