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An innovative probe microscopy solution for measuring conductivity profiles in 3-dimensions

dc.contributor.authorCelano, Umberto
dc.contributor.authorParedis, Kristof
dc.contributor.authorHumphris, Andrew
dc.contributor.authorTedaldi, Matt
dc.contributor.authorO'Sullivan, Connor Laharn
dc.contributor.authorHole, Patrick
dc.contributor.authorGoulden, Jenny
dc.date.accessioned2021-10-31T08:12:04Z
dc.date.available2021-10-31T08:12:04Z
dc.date.issued2021
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36559
dc.sourceIIOimport
dc.titleAn innovative probe microscopy solution for measuring conductivity profiles in 3-dimensions
dc.typeProceedings paper
dc.contributor.imecauthorCelano, Umberto
dc.contributor.imecauthorParedis, Kristof
dc.contributor.imecauthorO'Sullivan, Connor Laharn
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.contributor.orcidimecParedis, Kristof::0000-0002-5163-4164
dc.source.peerreviewyes
dc.source.beginpage116110J
dc.source.conferenceMetrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
dc.source.conferencedate22/02/2021
dc.source.conferencelocationOnline Online
dc.identifier.urlhttps://doi.org/10.1117/12.2583065
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 11611


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