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Buried interface and buried film analysis using lab-scale Haxpes instruments

dc.contributor.authorConard, Thierry
dc.contributor.authorZborowski, Charlotte
dc.contributor.authorVanleenhove, Anja
dc.contributor.authorHoflijk, Ilse
dc.contributor.authorVaesen, Inge
dc.contributor.authorvan der Heide, Paul
dc.date.accessioned2021-10-31T08:14:54Z
dc.date.available2021-10-31T08:14:54Z
dc.date.issued2021
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36581
dc.sourceIIOimport
dc.titleBuried interface and buried film analysis using lab-scale Haxpes instruments
dc.typeOral presentation
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorZborowski, Charlotte
dc.contributor.imecauthorVanleenhove, Anja
dc.contributor.imecauthorHoflijk, Ilse
dc.contributor.imecauthorVaesen, Inge
dc.contributor.imecauthorvan der Heide, Paul
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecvan der Heide, Paul::0000-0001-6292-0329
dc.source.peerreviewno
dc.source.conferenceAVS Symposium
dc.source.conferencedate24/10/2021
dc.source.conferencelocationonline online
dc.identifier.urlhttps://www.avssymposium.org/AVS2021/Sessions/Schedule/70697
imec.availabilityPublished - imec
imec.internalnotesAS-Contributed On Demand-4


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