dc.contributor.author | de Marneffe, Jean-Francois | |
dc.contributor.author | Phong, Nguyen | |
dc.contributor.author | Couet, Sebastien | |
dc.contributor.author | Souriau, Laurent | |
dc.contributor.author | Stafford, Nathan | |
dc.contributor.author | Pallem, Venkateswara | |
dc.contributor.author | De Gendt, Stefan | |
dc.date.accessioned | 2021-10-31T08:22:15Z | |
dc.date.available | 2021-10-31T08:22:15Z | |
dc.date.issued | 2021 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/36628 | |
dc.source | IIOimport | |
dc.title | Exploring thermal ALE for spin-torque majority gate applications | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
dc.contributor.imecauthor | Couet, Sebastien | |
dc.contributor.imecauthor | Souriau, Laurent | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.orcidimec | Couet, Sebastien::0000-0001-6436-9593 | |
dc.contributor.orcidimec | Souriau, Laurent::0000-0002-5138-5938 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.source.peerreview | yes | |
dc.source.beginpage | LI-ALE_WeM3-#% | |
dc.source.conference | Atomic Layer Etching Workshop 2021 | |
dc.source.conferencedate | 27/06/2021 | |
dc.source.conferencelocation | Tampa, FL USA | |
dc.identifier.url | https://www.avssymposium.org/ALD2021/Sessions/Schedule/70135 | |
imec.availability | Published - imec | |