Authors

Dey, Bappaditya; Halder, Sandip; Khalil, K.; Lorusso, Gian; Severi, Joren; Leray, Philippe; Bayoumi, M.

Conference

Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV

Title

SEM image denoising with Unsupervised Machine Learning for better defect inspection and metrology

Publication type

Proceedings paper