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A scheme to correct for inaccuracies in the compositional analysis of SixGe1-x by Atom Probe Tomography

dc.contributor.authorDialameh, Masoud
dc.contributor.authorScheerder, Jeroen
dc.contributor.authorMorris, Richard
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorRichard, Olivier
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorvan der Heide, Paul
dc.contributor.authorFleischmann, Claudia
dc.date.accessioned2021-10-31T08:30:14Z
dc.date.available2021-10-31T08:30:14Z
dc.date.issued2021
dc.identifier.issn1431-9276
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36673
dc.sourceIIOimport
dc.titleA scheme to correct for inaccuracies in the compositional analysis of SixGe1-x by Atom Probe Tomography
dc.typeJournal article
dc.contributor.imecauthorDialameh, Masoud
dc.contributor.imecauthorScheerder, Jeroen
dc.contributor.imecauthorMorris, Richard
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorvan der Heide, Paul
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.orcidimecDialameh, Masoud::0000-0002-1439-590X
dc.contributor.orcidimecScheerder, Jeroen::0000-0002-9301-0392
dc.contributor.orcidimecMorris, Richard::0000-0002-0902-7088
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecvan der Heide, Paul::0000-0001-6292-0329
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.identifier.doi10.1017/S1431927621001240
dc.source.peerreviewyes
dc.source.beginpage178
dc.source.endpage179
dc.source.journalMicroscopy and Microanalysis
dc.source.issueS1
dc.source.volume27
dc.identifier.urlhttps://doi.org/10.1017/S1431927621001240
imec.availabilityPublished - imec


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