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Tuning strain in nanosheet devices

dc.contributor.authorFavia, Paola
dc.contributor.authorEneman, Geert
dc.contributor.authorVeloso, Anabela
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorRichard, Olivier
dc.contributor.authorBender, Hugo
dc.date.accessioned2021-10-31T08:36:57Z
dc.date.available2021-10-31T08:36:57Z
dc.date.issued2021
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36706
dc.sourceIIOimport
dc.titleTuning strain in nanosheet devices
dc.typeMeeting abstract
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.source.peerreviewyes
dc.source.conferenceMicroscopy Conference 2021 & Multinational Conference on Microscopy 2021
dc.source.conferencedate22/08/2021
dc.source.conferencelocationonline online
imec.availabilityPublished - imec


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