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(TOF)SIMS applications to micro/nano electronics

dc.contributor.authorFranquet, Alexis
dc.contributor.authorSpampinato, Valentina
dc.date.accessioned2021-10-31T08:38:59Z
dc.date.available2021-10-31T08:38:59Z
dc.date.issued2021
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36716
dc.sourceIIOimport
dc.title(TOF)SIMS applications to micro/nano electronics
dc.typeOral presentation
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.source.peerreviewno
dc.source.conference10eme Edition de la REUNION DES UTILISATEURS FRANCOPHONES ToF-SIMS / IONTOF
dc.source.conferencedate23/03/2021
dc.source.conferencelocationonline
imec.availabilityPublished - imec


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