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Compact and low power silicon photonic components based on MEMS

dc.contributor.authorGylfason, Kristinn B.
dc.contributor.authorEdinger, Pierre
dc.contributor.authorErrando-Herranz, Carlos
dc.contributor.authorTakabayashi, Alain Yuji
dc.contributor.authorSattari, Hamed
dc.contributor.authorQuack, Niels
dc.contributor.authorVerheyen, Peter
dc.contributor.authorBogaerts, Wim
dc.date.accessioned2021-10-31T08:46:22Z
dc.date.available2021-10-31T08:46:22Z
dc.date.issued2021
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36749
dc.sourceIIOimport
dc.titleCompact and low power silicon photonic components based on MEMS
dc.typeProceedings paper
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecVerheyen, Peter::0000-0002-8245-9442
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage116970Y
dc.source.conferenceMOEMS and Miniaturized Systems XX
dc.source.conferencedate6/03/2021
dc.source.conferencelocationCalifornia (online) usa
dc.identifier.urlhttps://doi.org/10.1117/12.2582947
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 11697


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