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Effect of metal contamination and improved cleaning strategies

dc.contributor.authorMertens, Paul
dc.contributor.authorBearda, Twan
dc.contributor.authorLoewenstein, Lee
dc.contributor.authorMartin, A.R.
dc.contributor.authorHub, W.
dc.contributor.authorKolbesen, B. O.
dc.contributor.authorTeerlinck, Ivo
dc.contributor.authorVos, Rita
dc.contributor.authorBaeyens, Martien
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorKenis, Karine
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-14T11:30:42Z
dc.date.available2021-10-14T11:30:42Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3674
dc.sourceIIOimport
dc.titleEffect of metal contamination and improved cleaning strategies
dc.typeProceedings paper
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage401
dc.source.endpage413
dc.source.conferenceDefects in Silicon III
dc.source.conferencedate2/05/1999
dc.source.conferencelocationSeattle, WA USA
imec.availabilityPublished - open access
imec.internalnotesElectrochemical Society Proceedings; Vol. 99-1


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