dc.contributor.author | Mertens, Paul | |
dc.contributor.author | Bearda, Twan | |
dc.contributor.author | Loewenstein, Lee | |
dc.contributor.author | Martin, A.R. | |
dc.contributor.author | Hub, W. | |
dc.contributor.author | Kolbesen, B. O. | |
dc.contributor.author | Teerlinck, Ivo | |
dc.contributor.author | Vos, Rita | |
dc.contributor.author | Baeyens, Martien | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Kenis, Karine | |
dc.contributor.author | Heyns, Marc | |
dc.date.accessioned | 2021-10-14T11:30:42Z | |
dc.date.available | 2021-10-14T11:30:42Z | |
dc.date.issued | 1999 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3674 | |
dc.source | IIOimport | |
dc.title | Effect of metal contamination and improved cleaning strategies | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Mertens, Paul | |
dc.contributor.imecauthor | Vos, Rita | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | Kenis, Karine | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 401 | |
dc.source.endpage | 413 | |
dc.source.conference | Defects in Silicon III | |
dc.source.conferencedate | 2/05/1999 | |
dc.source.conferencelocation | Seattle, WA USA | |
imec.availability | Published - open access | |
imec.internalnotes | Electrochemical Society Proceedings; Vol. 99-1 | |