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Effect of metal contamination and improved cleaning strategies

dc.contributor.authorMertens, Paul
dc.contributor.authorBearda, Twan
dc.contributor.authorLoewenstein, Lee
dc.contributor.authorMartin, Andreas
dc.contributor.authorHub, Walter
dc.contributor.authorKolbesen, Bernd
dc.contributor.authorTeerlinck, Ivo
dc.contributor.authorVos, Rita
dc.contributor.authorBaeyens, Martien
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorKenis, Karine
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-14T11:30:44Z
dc.date.available2021-10-14T11:30:44Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3675
dc.sourceIIOimport
dc.titleEffect of metal contamination and improved cleaning strategies
dc.typeProceedings paper
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference6th International SCP Symposium "Meeting the Surface Preparation Challenges of the New Millennium"
dc.source.conferencedate10/05/1999
dc.source.conferencelocationBosie, ID USA
imec.availabilityPublished - open access


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