dc.contributor.author | Puliyalil, Harinarayanan | |
dc.contributor.author | Feurprier, Yannick | |
dc.contributor.author | Oikawa, Noriaki | |
dc.contributor.author | Vega Gonzalez, Victor | |
dc.contributor.author | Briggs, Basoene | |
dc.contributor.author | Montero Alvarez, Daniel | |
dc.contributor.author | Lazzarino, Frederic | |
dc.contributor.author | Tokei, Zsolt | |
dc.contributor.author | Satoru, Nakamura | |
dc.contributor.author | Tahara, Shigeru | |
dc.contributor.author | Kumar, Kaushik | |
dc.date.accessioned | 2021-10-31T10:29:41Z | |
dc.date.available | 2021-10-31T10:29:41Z | |
dc.date.issued | 2021 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/37072 | |
dc.source | IIOimport | |
dc.title | High Aspect Ratio Supervia Dual Damascene etch for iN5 and beyond | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Puliyalil, Harinarayanan | |
dc.contributor.imecauthor | Feurprier, Yannick | |
dc.contributor.imecauthor | Oikawa, Noriaki | |
dc.contributor.imecauthor | Vega Gonzalez, Victor | |
dc.contributor.imecauthor | Briggs, Basoene | |
dc.contributor.imecauthor | Montero Alvarez, Daniel | |
dc.contributor.imecauthor | Lazzarino, Frederic | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.imecauthor | Kumar, Kaushik | |
dc.contributor.orcidimec | Puliyalil, Harinarayanan::0000-0002-9749-5307 | |
dc.contributor.orcidimec | Montero Alvarez, Daniel::0000-0001-9966-0399 | |
dc.contributor.orcidimec | Lazzarino, Frederic::0000-0001-7961-9727 | |
dc.source.peerreview | no | |
dc.source.conference | AVS 67th International Symposium and Exhibition | |
dc.source.conferencedate | 24/10/2021 | |
dc.source.conferencelocation | online online | |
dc.identifier.url | https://www.avssymposium.org/AVS2021/Sessions/Schedule/70702 | |
imec.availability | Published - imec | |
imec.internalnotes | PS-Contributed On Demand-22 | |