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Sol-gel growth of PZT on reactively sputtered RuO2 electrodes

dc.contributor.authorNorga, Gerd
dc.contributor.authorFè, Laura
dc.contributor.authorWouters, Dirk
dc.contributor.authorIing, S.
dc.contributor.authorMaes, Herman
dc.date.accessioned2021-10-14T11:31:58Z
dc.date.available2021-10-14T11:31:58Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3708
dc.sourceIIOimport
dc.titleSol-gel growth of PZT on reactively sputtered RuO2 electrodes
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceCOST 514 Workshop Ferroelectric Ceramic Thin Films; 16-17 April 1999; Aachen, Germany.
dc.source.conferencedate16/04/1999
dc.source.conferencelocationAachen Germany
imec.availabilityPublished - imec


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